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Process Variation Impact on Photonics Devices: How Lithographic Techniques Affect Optical Performance - Europe
June 6, 2023; 10:00–11:00 a.m. CET
Photonic device production is increasing with AR/VR devices. AR/VR optical components include metalenses patterned over large areas, and the fidelity of this pattern may have a significant impact on performance. In this presentation, we will demonstrate the impact of various lithographic and correction techniques on metalens performance.